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Key Features

- Dual Channel Chiller
- User friendly touch screen panel
- Reduced power consumption (to 50%)
  (Current rating: 60A>>30A)
- Multiple interfaces (Analog/Digital)
- Slim body /Small foot print
- SEMI S2 / F47 and CE mark certified

ESL-60 Specification

Temp. range Ch-1 -20 to +80deg.C/Dual ChannelChiller
Ch-2 +10 to +40deg.C/Dual Channel Chiller
temp. accuracy 1deg.C
Heat medium GALDEN/Fluorinert/DI-EG
Cooling capacity Ch-1: 3kW (at +20deg.C)
Ch-2 : 5kW (at +20deg.C)
Pump capacity: GL Ch-1: 15L/min (at 0.4MPa)
Pump capacity: DI Ch-2: 17L/min (at 0.45MPa)
Utility water 30L/min (at +20deg.C)
Special spec Accepted
Interface Analog/Digital
Dimensions W:450 x D:950 x H:1700mm
Power supply AC208V 3φ 30A 50/60Hz

Note: All specifications subject to change without notice

ESL-60 Cooling Capacity Curve

Click on image to enlarge


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