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Thermo Electric Module
Environmentally friendly – Non-Freon
Small footprint
Precise Temperature accuracy ±0.1deg.C
Multiple interfaces(RS-232C/RS-485, others)
Air- and Water-cooled models available
System compatible with DI-Water, Ethylene Glycol, Fluorinated base liquid
Vibration free and low noise
TEM Chiller Applications
Petrochemical
Pharmaceutical
Laser cooling and laser measurement/Analyzer instruments
Semiconductor Etch, CVD, PVD, Asher and other tools
MO-CVD gas temperature control
SEM and ion beam milling
Coating/Printing/Marking machines
| EN Series | |
|---|---|
|
# of Channels |
1 |
|
Temp Range (deg. C) |
+10℃ ~ +60℃ |
|
Cooling Capacity |
Up to 1kW |
|
Heater |
Up to 4kW |
|
Pump Capacity |
4.9 Lpm @ 58 psi |
The performance data displayed on this chart is at 60Hz. Please contact us if the performance at 50Hz is needed.