EN Series

Key Features and Benefits:

Thermo Electric Module

Environmentally friendly – Non-Freon
Small footprint
Precise Temperature accuracy ±0.1deg.C
Multiple interfaces(RS-232C/RS-485, others)
Air- and Water-cooled models available
System compatible with DI-Water, Ethylene Glycol, Fluorinated base liquid
Vibration free and low noise

TEM Chiller Applications

Laser cooling and laser measurement/Analyzer instruments
Semiconductor Etch, CVD, PVD, Asher and other tools
MO-CVD gas temperature control
SEM and ion beam milling
Coating/Printing/Marking machines

Typical Specifications:

EN Series
# of Channels
Temp Range (deg. C)
+10℃ ~ +60℃
Cooling Capacity
Up to 1kW
Up to 4kW
Pump Capacity
4.9 Lpm @ 58 psi

The performance data displayed on this chart is at 60Hz. Please contact us if the performance at 50Hz is needed.