EN Series

Thermo Electric Module

Environmentally friendly – Non-Freon
Small footprint
Precise Temperature accuracy ±0.1deg.C
Multiple interfaces(RS-232C/RS-485, others)
Air- and Water-cooled models available
System compatible with DI-Water, Ethylene Glycol, Fluorinated base liquid
Vibration free and low noise

TEM Chiller Applications

Petrochemical
Pharmaceutical
Laser cooling and laser measurement/Analyzer instruments
Semiconductor Etch, CVD, PVD, Asher and other tools
MO-CVD gas temperature control
SEM and ion beam milling
Coating/Printing/Marking machines